Work

MEMS Gas Sensor Arrays with Multilayer of Nanomaterials Patterned by Wafer-Level Photolithography Process

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11110438

Authors: Xitong Sun, Jin Li, Tongheng Cheng, Fei Wang

Institution: Southern University of Science and Technology

Language: English

Topic: Gas Sensing Nanomaterials and Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G6300296567

OpenAlex ID: W4413322005

FWCI:

Cites: 18

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Related to: 10