Work

Monolthic Integration of a Filter for Switching Driving Motion in Piezoeletric MEMS Microspeaker

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11111588

Authors: Tsung-Wen Tsai, Chia-Hao Lin, Chin Tseng, Po-Shen Chen, Sung-Cheng Lo, Weileun Fang

Institution: National Tsing Hua University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science and Technology Council

Award: G1434305207

OpenAlex ID: W4413322012

FWCI:

Cites: 10

Cited by:

Related to: 10