Work

Surface-Micromachined CMOS-Mems Capacitive Pressure Sensor with Enhanced Sensitivity for Low-Pressure Applications

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109866

Authors: Feiyun Wang, Xuan Ouyang, Wei Xu

Institution: Shenzhen University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413322014

FWCI: 6.961

Cites: 10

Cited by: 3

Related to: 10