MEMS Electric Field Sensor with Comb-Actuated Resonant Torsional Shutter
Year: 2025
Type: conference-paper
Authors: Yohan Jung, Eunhwan Jo, Jongbaeg Kim
Institutions: Yonsei University, Kumoh National Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G5329536809
OpenAlex ID: W4413322162