Work

Physics-Informed Neural Networks for Modal Analysis of Diaphragm-Structured Mems with Experimental Validation

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109732

Authors: Jiapeng Xu, Gabriele Schrag, Zhou Da, Yong Wang, Tingzhong Xu

Institutions: Silicon Austria Labs (Austria), Technical University of Munich, University of Oxford

Language: English

Topic: Model Reduction and Neural Networks

Subfield: Statistical and Nonlinear Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413322163

FWCI: 2.383

Cites: 8

Cited by: 1

Related to: 10