Work

Thermal Stress Tuning of Bistable Piezoelectric MEMS Membranes to Maximize Dynamic Deflections Towards Highest Switching Probability

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11111398

Authors: Philipp Moll, Shareena Muringakodan, Ulrich Schmid, Michael Schneider

Institution: TU Wien

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413322164

FWCI:

Cites: 12

Cited by:

Related to: 10