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A Novel Gaussian Doping Profile Model for High-Efficiency TCS Prediction in Piezoresistive Sensors

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11111525

Authors: Zhiheng Yu, Changyuan Mai, Fengyang Li, Dacheng Zhang

Institution: Peking University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Key Research and Development Program of China

Award: G2282555124

OpenAlex ID: W4413322328

FWCI:

Cites: 9

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Related to: 10