Work

Thin-Film Piezoelectric Suspended MEMS Resonators for Reducing Anchor Loss

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11110627

Authors: Maliha Sultana, Hamed Atashbar, Tanvir Hasan, Hakhamanesh Mansoorzare, Reza Abdolvand

Institution: University of Central Florida

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413322351

FWCI: 2.353

Cites: 7

Cited by: 1

Related to: 10