Work

CMOS BEOL-Compatible See-Saw Microelectromechanical Non-Volatile Memory with Low On-Resistance

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11110596

Authors: Yu-Hyun Shim, Tae-Soo Kim, Seung-Jun Lee, Sung-Ho Kim, So-Young Lee, Se-Yoon Jung, Seung-Been Noh, Yong-Bok Lee, Jun-Bo Yoon

Institutions: Korea Advanced Institute of Science and Technology, Chonnam National University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Ministry of Trade, Industry and Energy, National Research Foundation of Korea, Samsung

OpenAlex ID: W4413322373

FWCI: 2.3

Cites: 10

Cited by: 1

Related to: 10