Work

High Sensitivity and Wide Bandwidth in Multi-Mass MEMS Accelerometers

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11110523

Authors: Inês S. Garcia, Mubasher Saleem, Filipa C. Mota, Nélson Castro, Pablo Valentim, Rui Madeira, Alexandre Correia, Diogo E. Aguiam, Rosana A. Dias, Filipe S. Alves

Institutions: International Iberian Nanotechnology Laboratory, Universidade do Porto

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413322383

FWCI:

Cites: 6

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Related to: 10