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A Novel HBR-Based High Selectivity Non-Bosch Deep Silicon Etching Process Enhancing Mechanical Performance for MEMS Device

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109787

Authors: Yongquan Su, Yichen Liu, Hao Huang, Wanzhu Qiao, Xingwang Zhu, Lihao Wang, Zhenyu Wu

Institutions: Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, Shanghai Industrial Technology Institute

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413322393

FWCI: 7.075

Cites: 7

Cited by: 3

Related to: 10