Work

Vertical-Comb-Driven Tip-Tilt 32×32 Micromirror Array Based on Double-SOI and Single-Crystalline-Silicon TSV

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109159

Authors: Biyun Ling, Xiaoyue Wang, Minli Cai, Yuhu Xia, Biqing Zhou, Yuwei Han, Yaming Wu

Institutions: Chinese Academy of Sciences, State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413322425

FWCI:

Cites: 8

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Related to: 10