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A High-Performance Piezoelectric Micromachined Ultrasonic Transducer Hexagonal Array Utilizing Sacrificial Layer Technology

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11111135

Authors: Yunhao Wang, Ke Sun, Junxiang Cai, Yiwei Wang, Xiaoyuan Xia, Yemin Dong, Yi Sun, Tao Wu, Xinxin Li

Institutions: Chinese Academy of Sciences, ShanghaiTech University, State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Ultrasonics and Acoustic Wave Propagation

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Jiangsu Provincial Key Research and Development Program

Awards: G1399855030, 基于智能化能量获取的自供能自主报警无线传感节点技术

OpenAlex ID: W4413322574

FWCI: 11.86

Cites: 10

Cited by: 2

Related to: 10