Work

High-Speed and High-Precision Algorithm for LCCD-Based Triangulation Height Measurement

Year: 2025

Type: conference-paper

Abstract: To achieve high-speed and high-precision measurements, this study introduces a height measurement system based on LCCD and optical triangulation that utilizes a gray-scale centroid algorithm for sub-pixel positioning. Ultimately, the system achieves a resolution of 10 nm, a repeatability of 15 nm, and a stability of 7.8 nm, by setting up an experimental system in the laboratory.

Source: Journal of Physics Conference Series

DOI: 10.1088/1742-6596/3083/1/012008

Authors: Hengrui Guan, Xuefeng Lei, Yuheng Chu, Xinxin Zhao, Dapeng Kuang, Mingchun Ling, Maoxin Song, Jin Hong

Institutions: University of Science and Technology of China, Chinese Academy of Sciences, Hefei Institutes of Physical Science, Anhui Institute of Optics and Fine Mechanics

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: diamond

OpenAlex ID: W4413327528

FWCI: 0.857

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Cited by: 1

Related to: 10