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High sensitivity all-sapphire fiber diaphragm-based extrinsic Fabry-Perot interferometric pressure sensor for ultra-high temperature environments

Year: 2025

Type: article

Abstract: A high sensitivity all-sapphire fiber diaphragm-based extrinsic Fabry-Perot interferometer (EFPI) is proposed for pressure measurement in ultra-high temperature environments. The sensor is fabricated by directly bonding three polished sapphire wafers, forming the composite Fabry-Perot (FP) structure to simultaneously measure pressure and temperature. The demodulation accuracy is improved due to the polished sapphire wafers with low surface roughness. The sapphire fiber is adopted to pick up the sensing signals, effectively increasing the operating temperature of the sensing structure. Experimental results show that the sensing structure can work stably within the pressure range of 0 kPa to 300 kPa and the temperature range of 20 °C to 1415 °C. The optical cavity length (OCL) of the air cavity varies linear with pressure, and the pressure sensitivity increases from 17.02 nm/kPa at room temperature to 22.34 nm/kPa at 1415 °C. Based on its excellent performance, the proposed sensing structure is prospective for accurate pressure measurement in harsh environments.

Source: Optics Express

DOI: 10.1364/oe.568687

Authors: Shuang Zhao, Yi Jiang, Hui Deng, Yutong Zhang

Institution: Baotou Teachers College

Language: English

Topic: Advanced Fiber Optic Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270

Funder: National Natural Science Foundation of China