Work

MEMS—suspended gate field effect transistor (SGFET) accelerometer process integration with parylene flexure and plasma doping

Year: 2025

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/1361-6439/adfe75

Authors: Pramod Martha, Naveen Kadayinti, V Seena

Institutions: Manipal Academy of Higher Education, Indian Institute of Space Science and Technology, Indian Institute of Technology Dharwad

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413421068

FWCI: 1.386

Cites: 37

Cited by: 6

Related to: 10