Fluorine Modification Strategy for Switching Lithographic Polarity of Sb 2 −Oxo Clusters: Conversion of Negative‐Tone to Positive‐Tone Patterns †
Year: 2025
Type: article
Source: Chinese Journal of Chemistry
DOI: 10.1002/cjoc.70240
Authors: Si‐Ming Qi, Zuo‐Hu Zhou, Fang‐Fang Liu, Ze‐Qi Yu, Jian Wei, Ai‐Bing Yang, Hui‐Fang Zhao, Ni Zhen, Lei Zhang
Institution: Nankai University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G1845565043, G6272578465
OpenAlex ID: W4413443916