Work

Development of Pulse-Shape-Controlled Hybrid ArF Excimer Laser

Year: 2025

Type: conference-paper

DOI: 10.1109/cleo/europe-eqec65582.2025.11109389

Authors: Hironori Igarashi, Atsushi Fuchlmukai, Yasuhiro Kamba, Yasuaki Moriai, Rikuo Koike, Taisuke Miura

Institution: Gigaphoton Inc (Japan)

Language: English

Topic: Laser Design and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413458346

FWCI:

Cites: 2

Cited by:

Related to: 10