Work

Moiré fringe-based offset control method for overlay grating alignment using substrate grating and experimental verification

Year: 2025

Type: conference-paper

Source: International Conference on Optics and Machine Vision (ICOMV)

DOI: 10.1117/12.3071860

Authors: Shuonan Shan, Zhipeng Zeng, Xiaohao Wang, Xinghui Li

Institution: Tsinghua University

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413465614

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