Work

Multi-Agent Deep Reinforcement Learning-Based Collaborative Robot Scheduling for Concurrent Processing Optimization in Semiconductor Cluster Tools

Year: 2025

Type: article

Source: Journal of Korean Institute of Industrial Engineers

DOI: 10.7232/jkiie.2025.51.4.288

Authors: Minsung Cha, Jongwon Choi, Seoung Bum Kim

Language: English

Topic: Scheduling and Optimization Algorithms

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4413493869

FWCI: 0.519

Cites: 16

Cited by: 1

Related to: 10