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Predictive Maintenance in Semiconductor Manufacturing - AI Machine Learning Application for Downtime Reduction

Year: 2025

Type: conference-paper

Source: IEEE International Symposium on Industrial Electronics (ISIE)

DOI: 10.1109/isie62713.2025.11124753

Author: Ram Chandra Palsaniya

Language: English

Topic: Fault Detection and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4413514015

FWCI: 6.957

Cites: 4

Cited by: 3

Related to: 10