Graphene Pressure Sensor Based on Flip-Chip Bonding and Porous Silicon Nitride Membrane for Negative Pressure Measurement
Year: 2025
Type: article
Source: IEEE Sensors Journal
Institution: North University of China
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G1531042501, G6199585952
OpenAlex ID: W4413555991
