Work

Predictive Maintenance Using Machine Learning in Semiconductor Manufacturing

Year: 2025

Type: conference-paper

Source: IEEE International Symposium on Industrial Electronics (ISIE)

DOI: 10.1109/isie62713.2025.11124685

Authors: Ram Chandra Palsaniya, Ravindra Patil, Rajkumar Thanu

Institutions: Institute of Electrical and Electronics Engineers, Santa Clara University

Language: English

Topic: Reliability and Maintenance Optimization

Subfield: Safety, Risk, Reliability and Quality

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4413558607

FWCI: 9.488

Cites: 4

Cited by: 3

Related to: 10