Work

Research on the measurement of wet etching rates and Level Set simulation of patterned sapphire substrates

Year: 2025

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/1361-6439/ae00d1

Authors: Guorong Wu, Xuanrong Gu, Chen Qian, Jia Sun

Institutions: Taizhou University, Taizhou University

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Science and Technology Plan Project of Taizhou

OpenAlex ID: W4413820893

FWCI: 0.915

Cites: 29

Cited by: 2

Related to: 10