Work

Reversing the Temperature Gradient in a PECVD Deposition Chamber to Alter the Radicals Generated in the Plasma

Year: 2025

Type: conference-paper

Source: Conference record of the IEEE Photovoltaic Specialists Conference

DOI: 10.1109/pvsc59419.2025.11133223

Author: Gautam Ganguly

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Affordable and clean energy

Open Access status: closed

OpenAlex ID: W4413822255

FWCI:

Cites: 7

Cited by:

Related to: 10