Maintaining a High Electronic Quality Surface During Patterned Plasma Etching Processes for HJT-IBC Solar Cells
Year: 2025
Type: conference-paper
Institutions: Centre National de la Recherche Scientifique, École Polytechnique, Laboratoire de Physique des Interfaces et des Couches Minces, Institut Polytechnique de Paris, Total (France), Université de Versailles Saint-Quentin-en-Yvelines, Université Paris-Saclay, Institut Lavoisier de Versailles
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413822545
