Investigation on ultrasonic vibration assisted drilling of monocrystalline silicon: exit-chipping formation mechanism and axial force analysis
Year: 2025
Type: article
Authors: Mengqiu Yu, Zhen Yin, Qinglong An, Dingyi Tao, Zixin Yu, Qing Miao, Chenwei Dai, Ming Zhang, Hua Li
Language: English
Subfield: Mechanical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413849644
