Work

A Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection

Year: 2025

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/tsm.2025.3604789

Authors: Wei Chang, Kuan-Ting Yeh, Burn Jeng Lin, Pin-Jiun Wu, Jenny Yi-Chun Liu, Jiaw-Ren Shih, Chrong Jung Lin, Ya-Chin King

Institutions: National Tsing Hua University, National Synchrotron Radiation Research Center

Language: English

Topic: Radio Frequency Integrated Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funders: Taiwan Semiconductor Manufacturing Company, National Science and Technology Council

Awards: G6614175964, G8757419940

OpenAlex ID: W4413886958

FWCI:

Cites: 21

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Related to: 10