Work

Design of Spurious-Free Surface Acoustic Wave Resonators on LNOI Platform Using Machine Learning

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3601368

Authors: Haoqin Ma, Sulei Fu, Peisen Liu, Boyuan Xiao, Xinchen Zhou, Jiajun Gao, Cheng Song, Fei Zeng, Feng Pan

Institution: Tsinghua University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Natural Science Foundation of Beijing Municipality, National Key Research and Development Program of China

Awards: G1541818051, G5417326204, G5853392440, G992278719

OpenAlex ID: W4413887216

FWCI: 0.482

Cites: 42

Cited by: 2

Related to: 10