Work

Spurious-Free TF-SAW Resonators Improved Q Using Double Busbar and Thermal Annealing

Year: 2025

Type: article

Source: IEEE Electron Device Letters

DOI: 10.1109/led.2025.3604417

Authors: Yang Feng, Zonglin Wu, Hangyu Qian, Guanghui Zhao, Shijia Li, Yong Li, Hongyan Liang, Feihong Bao, Qiaozhen Zhang, Xiongchuan Huang

Institutions: Fudan University, China Electronics Technology Group Corporation, University of Electronic Science and Technology of China, Shanghai Normal University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G583097948, G7044618069

OpenAlex ID: W4413887348

FWCI: 1.927

Cites: 27

Cited by: 8

Related to: 10