A Comparative Evaluation of Different Test Structures for the Extraction of Ultralow Specific Contact Resistivity: A Review
Year: 2025
Type: article
Authors: Xianglie Sun, Xu Chen, Jun Luo
Institutions: Chinese Academy of Sciences, Institute of Microelectronics
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Chinese Academy of Sciences
Award: G2212060746
OpenAlex ID: W4413887448