Work

Impact of process control on electrical breakdown characteristics of quasi-one-dimensional ZrTe3 interconnects

Year: 2025

Type: article

Source: Applied Physics Letters

DOI: 10.1063/5.0271648

Authors: Xinyue Xu, Xiaokun Wen, Boyuan Di, Wenyu Lei, Wenchao Kong, Yuxiang Wang, Shiwan Zou, Liqiang Chen, Haixin Chang, Wenfeng Zhang

Institutions: State Key Laboratory of Materials Processing and Die & Mould Technology, Huazhong University of Science and Technology

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funders: National Natural Science Foundation of China, Natural Science Foundation of Hubei Province

Awards: G1581602197, G1719711068, G4663570690

OpenAlex ID: W4413910396

FWCI:

Cites: 21

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Related to: 10