Effect of post-deposition annealing atmosphere on ECR-sputtered Fe3O4 thin films and micromagnet fabrication
Year: 2025
Type: article
Institution: Japan Advanced Institute of Science and Technology
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413938596
