Work

High-performance turbomolecular pump with titanium alloy rotor blade

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0004731

Authors: Junichiro Kamiya, Kaoru Wada, Nang Tin Tin Htwe

Institutions: Japan Atomic Energy Agency, Osaka Vacuum, Ltd. (Japan)

Language: English

Topic: Gas Dynamics and Kinetic Theory

Subfield: Applied Mathematics

Field: Mathematics

Domain: Physical Sciences

Open Access status: closed

Funders: Japan Society for the Promotion of Science London, Japan Atomic Energy Agency

Award: G2188743137

OpenAlex ID: W4413954001

FWCI: 1.924

Cites: 11

Cited by: 1

Related to: 10