Work

Impact of oxygen plasma pulse time on atomic-layer-deposited ZrO2 antiferroelectric energy storage capacitors

Year: 2025

Type: article

Source: Applied Physics Letters

DOI: 10.1063/5.0289779

Authors: Conglin Zhang, Binbin Luo, Chenyan Wang, Ze Shang, Wei Meng, Bao Zhu, Xiaohan Wu, Shi-Jin Ding

Institution: Fudan University

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Affordable and clean energy

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G7363338601

OpenAlex ID: W4413986755

FWCI: 0.225

Cites: 31

Cited by: 1

Related to: 10