Work

Equilibrium shape of thermomigration Al-doped channels in Si wafers

Year: 2025

Type: article

Source: Materials Science and Technology

DOI: 10.1177/02670836251371444

Authors: Vladimir B Shirokov, Boris M Seredin, Pavel E Timoshenko, Valery V Kalinchuk, Victor P Popov, Alexander V Malibashev

Institutions: Russian Academy of Sciences, Southern Federal University, Southern Scientific Center, Platov South-Russian State Polytechnic University, South-Russian State Polytechnic University named after MI Platov

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funder: Ministry of Education and Science of the Russian Federation

OpenAlex ID: W4413988040

FWCI:

Cites: 15

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Related to: 10