Work

Effect of the TiN-coating-layer properties on the electron emission of volcano-structured silicon field emitter arrays

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0004845

Authors: Hiromasa Murata, Tomoaki Osumi, Yasuhito Gotoh, Katsuhisa Murakami, Masayoshi Nagao

Institutions: National Institute of Advanced Industrial Science and Technology, Kyoto University

Language: English

Topic: Photocathodes and Microchannel Plates

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Shimadzu, Japan Society for the Promotion of Science

Award: G2636734103

OpenAlex ID: W4413989145

FWCI: 0.723

Cites: 37

Cited by: 3

Related to: 10