Work

ToF-SIMS spectra of typical substrates in both polarities: Si wafer, Au-coated glass, and ITO-coated glass

Year: 2025

Type: article

Abstract: ToF-SIMS is a surface analysis technique, and as a result, many samples need to be spotted or mounted onto a suitable substrate. Different substrates can be used for ToF-SIMS analysis, and it is essential to properly assign the characteristic chemical signals from the substrate to distinguish them from the sample analyte ions. Here, the authors provide a reference database that provides ToF-SIMS spectra for three widely used substrates in positive and negative polarities. The six spectra were acquired using a 30 keV Bi3+ primary ion beam, with Ar gas cluster ion beam sputter cleaning of the surfaces before analysis.

Source: Surface Science Spectra

DOI: 10.1116/6.0004796

Authors: Kimberly G. Garcia, Eloise Gaspar, Sebastiaan Van Nuffel

Institution: Maastricht University

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W4414018554

FWCI: 0.459

Cites: 8

Cited by: 1

Related to: 10