Work

Classification and Prediction of Wafer Yield Using Gradient Boosting Algorithms: A Focus on Lithography Inline Parameters

Year: 2025

Type: conference-paper

Source: IEEE International Conference on Computing and Machine Intelligence (ICMI)

DOI: 10.1109/icmi65310.2025.11141195

Authors: Mohammed Nizamul Islam, Md Tarekul Islam, Maruf A Dhali

Institutions: Infineon Technologies (Germany), Technische Universität Dresden, University of Groningen

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414054540

FWCI:

Cites: 15

Cited by:

Related to: 10