Work

ADAPT: A Set of Adaptive Algorithms for Optimizing Excimer Laser Availability and Power Consumption

Year: 2025

Type: conference-paper

Source: IEEE Conference on Control Technology and Applications (CCTA)

DOI: 10.1109/ccta53793.2025.11151281

Authors: Mruganka Kashyap, Siyu Chen, Ge Song, Matt Minakais

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414086023

FWCI:

Cites: 14

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Related to: 10