Work

Thermal Stability of Titanium Film Formed on a Substrate by Vacuum Plasma (Argon Plasma) Electric Arc Sputtering

Year: 2025

Type: article

Source: Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques

DOI: 10.1134/s1027451025700764

Authors: Yu. F. Ivanov, N. N. Koval, E. A. Petrikova, N. A. Prokopenko, A. D. Teresov, O. S. Tolkachev

Institutions: Russian Academy of Sciences, Siberian Branch of the Russian Academy of Sciences, Institute of High Current Electronics

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414095094

FWCI:

Cites: 12

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Related to: 10