Work

Study of Silicon Amorphization by Xenon Ions Using Transmission Electron Microscopy and Monte Carlo Simulation

Year: 2025

Type: article

Source: Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques

DOI: 10.1134/s1027451025700430

Authors: O. V. Podorozhniy, A. V. Rumyantsev, N. I. Borgardt, D. K. Minnebaev, A. E. Ieshkin

Institutions: National Research University of Electronic Technology, Lomonosov Moscow State University

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414095525

FWCI: 0.444

Cites: 28

Cited by: 1

Related to: 10