Work

Polymorphic States in the Electron-Beam Exposure-Induced CaSi2 Film Growth at the CaF2 Epitaxy on Si

Year: 2025

Type: article

Source: Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques

DOI: 10.1134/s1027451025700752

Authors: A. V. Kacyuba, A. V. Dvurechenskii, G. N. Kamaev, V. A. Volodin

Institutions: Russian Academy of Sciences, Siberian Branch of the Russian Academy of Sciences, Institute of Semiconductor Physics, Novosibirsk State University

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414095531

FWCI:

Cites: 31

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Related to: 10