Simulations of E–H mode transition in inductively coupled plasmas via 2D particle-in-cell/Monte Carlo collision method
Year: 2025
Type: article
Authors: Zhaoyu Chen, Zili Chen, Yu Wang, Wei Jiang, Yonghua Ding, Donghui Xia, Ya Zhang
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G6680748996, G7061558475
OpenAlex ID: W4414106085
