Quality Prediction in Multi-Stage Manufacturing with Hybrid TCN-Transformer
Year: 2025
Type: conference-paper
Authors: Siwei Peng, Rui Wang, Peng Li, Yangkun Zhang
Institution: Harbin Institute of Technology
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: 数据驱动的多工序半导体制造过程质量控制方法研究
OpenAlex ID: W4414170757