Fabrication of optical microstructures using direct laser writing and deep reactive ion etching technologies
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3072958
Authors: Jana Zimanová, Václav Prajzler
Institution: Czech Technical University in Prague
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4414172492
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