Work

Structural design and simulation analysis for plasma edge diffusion control in diamond polishing

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3071545

Authors: Shutong Gong, Xiaojing Li, Varbanov Vladimir, Xiaoxue Wu, Lin Wang, Kai Jiang

Institutions: Bulgarian Academy of Sciences, Institute of Metal Science, Equipment and Technologies

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414196891

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