Work

High aspect ratio and steepness TiO2 metasurface fabrication via stepwise mixed-gas ICP etching

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3072001

Authors: Qikai Chen, Junhuai Jiang, Qirui Lv, Chengtao Lu, Yaoguang Ma

Institution: Zhejiang University

Language: English

Topic: Metamaterials and Metasurfaces Applications

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414198873

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