Work

Numerical analysis approach to thermal stress effects on dislocation behavior due to incomplete seeding in Czochralski (CZ) silicon crystal growth

Year: 2025
Type: article
Authors: Hiroki Tsukada, Rintaro To, Takeshi Hoshikawa, Hiroyuki Saito, Hisashi Matsumura, Toshinori Taishi
Institution: Shinshu University
Language: English
Open Access status: closed
OpenAlex ID: W4414206534
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Cites: 21
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