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A Higher-Yielding Route for the Synthesis of Molecular Precursors to Thin Films of Gold by Atomic Layer Deposition

Year: 2025
Type: article
Abstract: High Resolution Image Download MS PowerPoint Slide A synthetically straightforward and high-yielding route to the series of complexes [AuMe 2 (dtc)] (dtc = dithiocarbamate) has been developed using dialkyl-, cyclic-dialkyl-, and diaryldithiocarbamate ligands. These compounds were screened by thermogravimetric analysis (TGA) to determine their viability as molecular precursors to thin films of elemental gold by atomic layer deposition. TGA revealed that the volatility of the precursor decreased as the mass of the precursor increased, making the heavier molecules less suitable precursors. However, [AuMe 2 (Me 2 dtc)], the lightest member of the series, is potentially a better precursor than [AuMe 2 (Et 2 dtc)] due to its higher volatility and slightly lower residual mass.
Language: English
Open Access status: hybrid
Estimated APC paid: $4,500
OpenAlex ID: W4414247528
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Cites: 36
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